Guoguang Electric Co., Ltd. Chengdu
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  • Contact Person : Mr. Hao Jian
  • Company Name : Guoguang Electric Co., Ltd. Chengdu
  • Tel : 86-28-88491611, 84372044
  • Fax : 86-28-88491511
  • Address : Sichuan,Chengdu,No.117 Xingguangxi Road, Longquanyi District
  • Country/Region : China
  • Zip : 610100

1kW/2450MHz Microwave Plasma System

1kW/2450MHz Microwave Plasma System
Product Detailed
Related Categories:Other Machinery
GMPS-2010K RectangularCavity Microwave Plasma System.

GMPS-2010K RectangularCavity Microwave Plasma System

Features:

1.0kW/2450MHz microwave power source    with programmable control system    provides adjustable output power from 0.1  to 1.0kW with low ripple and precisely regulation.

Circulator, tuner, sampling dummy load   and waveguides consist of transmission    system, which insure isolation between magnetron and reflecting wave, and regulate best matching.

The special designed wave guide with slots coupled large area microwave rectangular cavity as the reacting applicator is the outstanding one we recent developed. It has very promise to excite an intense spatially stable plasma where the substrates be placed and realize a large area substrates films MPCVD with stable operation.

Built in high vacuum system and two fine MFC systems.

With Sample supporter moveable and temperature auto control

Application: MPCVD research and middle-mass production for diamond or various kinds of films.

Specification

Frequency

2450±50MHz

Power Output

0.3-1kW Continue Adjustable

Power Stability

< ±2% ( at specific Power level )

Wave guide

WR-340 with FD-340 Flange

Control Interface

RS-232 Program Controllable

Power Supply

380V±10%  3 Phase 4 Line

Cooling Water

> 3 L / min

System VSWR

≤ 1.2

Leakage

< 5mW/cm2 ( IEC Standard )

Window Dimension

440L×200W×15H mm

Vacuum System

P < 1×10-1 Pa.

Gas MFC System

2 MFC ( Mass Flow Control )

1kW/2450MHz Microwave Plasma System



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